研究用真空蒸发机
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R&D Evaporator for OLED
真能蒸发OLED用各种有机物、 Metal(Al, Ag, Mg)、无机物(LiF)
机板前处理： UVO or Plasma前处理， Seal line Dispensing, UV curing
| Items | Evaporator | Remarks | |
|---|---|---|---|
| Substrate size | 25mm x 25mm glass, 4ea | ||
| Chamber Size(mm) | L970 X W1,000 X H1,854 | ||
| All Evapoator Size(mm) | L5,200 X W2,000 X H2,200 | with working area | |
| Source | Organic | 18ea(Max.) | up to request |
| LiF, Al | Option | up to request | |
| Mg/Ag | Option | up to request | |
| Al feeder | 16~24 pockets | Optional | |
| Deposition controller | ● | ||
| Glove box | Dispenser | ● | |
| UV curing | ● | ||
| UVO Treatment | ● | Optional (Plasma Treatment) |
|
| Pump | Rotary | ● | up to request |
| Cryo(Process Ch.) | ● | ||
| TMP | ● | Optional (Loading Ch.) |
|
| Operation pressure | Low 10-7 Torr | ||
| Control | Base on PC software | ||
| Inert gas | Ar or N2 | ||
| Compressed Air(kg/cm2f) | 5~7 | ||
| Cooling water(ℓ/min) | 20 | ||
Cluster type Evaporator for R&D
| Items | Evaporator | Remarks | ||
|---|---|---|---|---|
| Substrate size | 25mm x 25mm glass, 4ea | |||
| 45mm x 45mm glass, 4ea | ||||
| All Evapoator Size(mm) | 6,500(W) x 1,800(D) x 1,870(H) (SUS304 / EP) | with working area | ||
| Deposition controller | ● | |||
| Organic Chamber |
Size(mm) | 1,000(W) x 855(D) x 790(H) (SUS304 / EP) | ||
| Source | Organic | 24ea | up to request | |
| Pump | Dry or Rotary | ● | up to request | |
| Cryo(Process Ch.) | ● | |||
| Operation pressure | Low 10-7 Torr | |||
| DC power supply | 24ea | up to request | ||
| Matal Chamber |
Size(mm) | 510(W) x 470(D) x 710(H) (SUS304 / EP) | ||
| Source | Mg/Ag | Option | up to request | |
| LiF, Al | Option | up to request | ||
| Pump | Dry or Rotary | ● | up to request | |
| Cryo(Process Ch.) | ● | |||
| Operation pressure | Low 10-7 Torr | |||
| Al feeder | 16~24 pockets | Optional | ||
| DC power supply | 2ea | |||
| Loadloak (cassette) Chamber |
Size(mm) | 170(W) x 200(D) x 354(H) (Aluminum) | ||
| Pump | Dry or Rotary | ● | up to request | |
| Operation pressure | Middle 10-7 Torr | |||
| Cassette Module | 10ea | up to request | ||
| Transfer Chamber |
Size(mm) | 500(W) x 500(D) x 150(H) (Aluminum) | ||
| Pump | Dry or Rotary | ● | up to request | |
| TMP | ● | Optional(Loading Ch.) | ||
| Operation pressure | Middle 10-7 Torr | |||
| Plasma Treatment Chamber |
Size(mm) | Φ380 x 260(H) (SUS304 / EP) | ||
| Pump | Dry or Rotary | ● | up to request Optional : UVO |
|
| TMP | ● | |||
| Operation pressure | Middle 10-7 Torr | |||
| Pressure control | Auto Pressure Control Unit | |||
| RF power supply | 600W | |||
| Glove box | Size(mm) | 2,200(W) x 850(D) x 1,820(H) | ||
| Despensor | ● | |||
| UV curing | ● | |||
| Control | Base on PC software | |||
| Inert gas | Ar, N2, O2 | |||
| Compressed Air(kg/cm2f) | 5~7 | |||
| Cooling water(ℓ/min) | 30 | |||