真空干燥炉
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干燥OLED用有机物、医药品等需要在真空环境中进行干燥的材料的装置，可以缩短主工艺流程的净化时间。
| Items | Model | Remarks | ||
|---|---|---|---|---|
| D600R | D1000R | D1500R | ||
| Chamber size | Ø600mm X L600 | Ø1000mm X L1,000 | Ø1,500mm X L1,000 | up to user's request |
| Chamber material | Body SUS304, Door Al | |||
| Working vacuum | middle 10E-2Torr | |||
| Pumping port | NW25KF | NW25KF | NW40KF | |
| Working Temp. | Max. 250℃, Normal 170℃ | |||
| Nomber of Shielf | 2 | 4~6 | 6~10 | up to user's request |
| Temp. control | Programable Temp controller, PLC, SCR | |||
| Loding capa.(Kg) | 10~15 | 30~50 | 100 | |
| consumming power | 8~10kW | 12~15kW | 20kW | |
| chamber vent | N2 purge | |||
| Control | PC or PLC | up to user's request | ||