R&D Evaporator for OLED

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R&D Evaporator for OLED

Deposition : Organic Material / Metal(Al, Ag, Mg, …) / Inorganic Material(LiF,…)

Substrate treatment : UVO or Plasma treatment, Seal line dispensing, UV curing

Items Evaporator Remarks
Substrate size 25mm x 25mm glass, 4ea
Chamber Size(mm) L970 X W1,000 X H1,854
All Evapoator Size(mm) L5,200 X W2,000 X H2,200 with working area
Source Organic 18ea(Max.) up to request
LiF, Al Option up to request
Mg/Ag Option up to request
Al feeder 16~24 pockets Optional
Deposition controller ●
Glove box Dispenser ●
UV curing ●
UVO Treatment ● Optional
(Plasma Treatment)
Pump Rotary ● up to request
Cryo(Process Ch.) ●
TMP ● Optional
(Loading Ch.)
Operation pressure Low 10-7 Torr
Control Base on PC software
Inert gas Ar or N2
Compressed Air(kg/cm2f) 5~7
Cooling water(ℓ/min) 20

Cluster type Evaporator for R&D

Items Evaporator Remarks
Substrate size 25mm x 25mm glass, 4ea
45mm x 45mm glass, 4ea
All Evapoator Size(mm) 6,500(W) x 1,800(D) x 1,870(H) (SUS304 / EP) with working area
Deposition controller ●
Organic
Chamber		 Size(mm) 1,000(W) x 855(D) x 790(H) (SUS304 / EP)
Source Organic 24ea up to request
Pump Dry or Rotary ● up to request
Cryo(Process Ch.) ●
Operation pressure Low 10-7 Torr
DC power supply 24ea up to request
Matal
Chamber 		 Size(mm) 510(W) x 470(D) x 710(H) (SUS304 / EP)
Source Mg/Ag Option up to request
LiF, Al Option up to request
Pump Dry or Rotary ● up to request
Cryo(Process Ch.) ●
Operation pressure Low 10-7 Torr
Al feeder 16~24 pockets Optional
DC power supply 2ea
Loadloak
(cassette)
Chamber 		 Size(mm) 170(W) x 200(D) x 354(H) (Aluminum)
Pump Dry or Rotary ● up to request
Operation pressure Middle 10-7 Torr
Cassette Module 10ea up to request
Transfer
Chamber 		 Size(mm) 500(W) x 500(D) x 150(H) (Aluminum)
Pump Dry or Rotary ● up to request
TMP ● Optional(Loading Ch.)
Operation pressure Middle 10-7 Torr
Plasma
Treatment
Chamber 		 Size(mm) Φ380 x 260(H) (SUS304 / EP)
Pump Dry or Rotary ● up to request

Optional : UVO
TMP ●
Operation pressure Middle 10-7 Torr
Pressure control Auto Pressure Control Unit
RF power supply 600W
Glove box Size(mm) 2,200(W) x 850(D) x 1,820(H)
Despensor ●
UV curing ●
Control Base on PC software
Inert gas Ar, N2, O2
Compressed Air(kg/cm2f) 5~7
Cooling water(ℓ/min) 30