Sputtering equipment for mass production
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Business Sputtering system
In-Line Sputter (vertical)
CIGS
| Contents | Specification | |
|---|---|---|
| Substrate size | 300㎜×300㎜×3㎜ | |
| Power supply type | Mo | DC |
| Cu-Ga | DC | |
| In | DC | |
| i-ZnO | RF | |
| ZnO:Al | Pulsed DC | |
| ITO | Pulsed DC | |
| Non-uniformity | ≤ ±5% | |
| Sub. Temp. | Max. 300℃ | |
| Base pressure | 10-7 torr | |
In-line suppterr (Horizental)
| Contents | Specification | |
|---|---|---|
| Substrate size | 1100㎜×1300㎜×1㎜ | |
| Coating | ITO | Pulsed DC |
| Non-uniformity | ≤ ±5% | |
| Sub. Temp. | Max. 300℃ | |
| Base pressure | 10-7 torr | |