Sublimation equipment for mass production
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Business Sublimation system
P200TR
P200TD
P278TD
| Items | Model | Remarks | |||
|---|---|---|---|---|---|
| P200TR | P200TD | P278TD | |||
| Quartz O.D.(mm) | Ø200mm | Ø200mm | Ø278mm | ||
| Heater meterial | Kanthal A-1 | ||||
| Heating zone(Number) | 7 | 10 | 7 | up to user's request | |
| Temp control zone(Number) | 7 | 11 | 14 | up to user's request | |
| Heating control | Bottom control | Bottom, Top each control | |||
| Heating temp(℃) | Max. 600℃ , Normal ≤ 500 ℃ | ||||
| Vacuum Pump | TMP | ● | ● | ● | Optional |
| Oil Diffusion | - | - | - | ||
| Dry | - | ● | ● | ||
| Rotary | ● | - | - | ||
| Uimate pressure | Low x10-7 Torr | Low x10-7 Torr | Low x10-7 Torr | ||
| Control | Base on PC software | Base on PC software & Remote control | up to user's request | ||
| Utilities compressed Air(kg/cm2f) | 5~7 | ||||
| N2 vent gas(kg/cm2f) | 2 | Optional : N2 or Air | |||
| Cooling water(ℓ/min) (Only for dry pump & diffusion pump) |
None | 3 | 3 | ||
P300DR
P300TR
P300TD
| Items | Model | Remarks | |||
|---|---|---|---|---|---|
| P300DR | P300TR | P300TD | |||
| Quartz O.D.(mm) | Ø300mm | Ø300mm | Ø300mm | ||
| Heater meterial | Kanthal A-1 | ||||
| Heating zone(Number) | 8 | 7 | 7 | up to user's request | |
| Temp control zone(Number) | 10 | 9 | 14 | up to user's request | |
| Heating control | Bottom, Top each control | ||||
| Heating temp(℃) | Max. 600℃ , Normal ≤ 500 ℃ | ||||
| Vacuum Pump | TMP | - | ● | ● | Optional |
| Oil Diffusion | ● | - | - | ||
| Dry | - | - | ● | ||
| Rotary | ● | ● | - | ||
| Uimate pressure | Low x10-6 Torr | Low x10-7 Torr | Low x10-7 Torr | ||
| Control | Base on PC software | Base on PC software | Base on PC software & Remote control | up to user's request | |
| Utilities compressed Air(kg/cm2f) | 5~7 | ||||
| N2 vent gas(kg/cm2f) | 2 | Optional : N2 or Air | |||
| Cooling water(ℓ/min) (Only for dry pump & diffusion pump) |
8 | None | 3 | ||
챔버 - 설계 시 구조 강도 해석
